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2583 results:
  • 791. Publications
    Date: 18.05.2021
    Patents S. Braun, F. Niklaus, A. Fischer, and H. Gradin, Method for the wafer-level integration of shape memory alloy wires. European Patent Application 2011843548, US Patent US9054224B2, Australia Patent 2011332334, Canada Patent 2818301, WO 2012071003 A1
  • 792. Publications / Patents - Publications
    Date: 18.05.2021
    Publications 2014 C. Banzhaf, M. Grieb, A. Trautmann, A. Bauer, L. Frey, Influence of Diverse Post-Trench Processes on the Electrical Performance of 4H-SiC MOS Structures, Materials Science Forum. 778–780 (2014) 595–598. https://doi.org/10.4028/www.scientific.net/MSF.778-780.595. C.T. Banzhaf, M. Grieb, A. Trautmann, A.J. Bauer, L. Frey, Inv
  • 793. Publications / Patents
    Date: 18.05.2021
    2011 L. Bohne, A. Trautmann, T. Pirk, W. Jaegermann, Strukturierung von Siliziumsubstraten für integrierte 3D-Dünnschichtbatterien, MikroSystemTechnik - KONGRESS (2011).
  • 794. Publications / Patents
    Date: 18.05.2021
    2013 C. Banzhaf, M. Grieb, A. Trautmann, A. Bauer, L. Frey, Characterization of Diverse Gate Oxides on 4H-SiC 3D Trench-MOS Structures, Materials Science Forum. 740–742 (2013) 691–694. https://doi.org/10.4028/www.scientific.net/MSF.740-742.691.
  • 795. Publications / Patents
    Date: 18.05.2021
    2010 A. Schneider, H. Rank, A.Trautmann, Eutectic wafer bonding for 3-D integration, IEEE Electronic System-Integration Technology Conference, (2010), 1-6.
  • 796. Publications / Patents
    Date: 18.05.2021
    2007 S.Kamiya, J.Kuypers, A.Trautmann, P.Ruther, O.Paul, Process Temperature Dependent Mechanical Properties of Polysilicon Measured Using a Novel Tensile Test Structure, IEEE Journal of Microelectromechanical Systems 16 Issue 2, (2007), 202 – 212. B. Levey, P. Gieschke, M. Dölle, S. Spinner, A. Trautmann, P. Ruther, O. Paul, CMOS-Integrat
  • 797. Publications / Patents
    Date: 18.05.2021
    2006 A.Trautmann, R.Denfeld, F.Heuck, P.Ruther, O.Paul, Novel Silicon Microneedle Stamps for Allergy Skin Prick Testing, Proc. MEMS’06, Istanbul, (2006), 434-437.
  • 798. Publications / Patents
    Date: 18.05.2021
    2005 M.Schuster, N.Klein, P.Ruther, A.Trautmann, O.Paul, P.Kuzel, F.Kadlec, An interconnected 2D-TM EBG structure for millimetre and sub-millimetre waves, IEEE Journal on Selected Areas in Communication, Vol.23, No.7, (2005), 1378-1384. P.Ruther, J.Bartholomeyczik, A.Buhmann, A. Trautmann, K.Steffen, O.Paul,  Microelectromechanica
  • 799. Publications / Patents
    Date: 18.05.2021
    2004 S.Kamiya, J.Kuypers, A.Trautmann, P.Ruther, O.Paul, Annealing Temperature Dependent Strength of Polysilicon Measured Using a Novel Tensile Test Structure, Proc. MEMS’04, Maastricht, (2004), 185-188. M.Schuster, N.Klein, P.Ruther, A.Trautmann, O.Paul, P.Kuzel, F.Kadlec, An interconnected 2D-TM EBG structure for millimetre and sub-millim
  • 800. Publications / Patents
    Date: 18.05.2021
    2003 A.Trautmann, P.Ruther, O.Paul, Microneedle Arrays Fabricated Using Suspended Etch Mask Technology Combined with Fluidic Through Wafer Vias, Proc. MEMS’03, Kyoto, (2003), 682-685. A.Trautmann, R.Haug, P.Ruther, O.Paul, Robustness of Silicon Microneedle Arrays Penetrating Bulk Material, Proc. Eurosensors XVII, (2003), 414-417.
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