The measurement of single cell contact of electrically active cells can help to develop new types of diagnostics and therapies, e.g. for cardiac arrhythmia or neurodegenerative diseases.In this project new shapes of micro and nano electrodes are fabricated to enlarge the contact between cell and electrode, thus increasing the signal-to-noise ratio and improving the detection limit. Multi electrode arrays (MEAs) are structured with porous alumina templates or processed with nanoimprint lithography. Then these patterns are filled with gold or platinum by electrochemical deposition. Subsequently the resulting electrodes are characterized with scanning electrode microscopy and atomic force microscopy to verify the micro and nano features; electrochemical impedance spectroscopy is used for the characterization of the electrical properties.Biocompatibility and drug tests with living cells are performed to demonstrate the reliability of the experimental set-up and to get specific cell reactions.