Arbeitsgruppe Chemische Prozesse in der Mikrotechnik


Veröffentlichungen „peer-reviewed“ (seit 2013)

N. Geisel, J. Clasohm, X. Shi, L. Lamboni, J. Yang, K. Mattern, G. Yang, K-H. Schäfer, M. Saumer: Micro-structured Multi-Level Bacterial Cellulose allows the Guided Growth of Neural Stem Cells, Small. 2016;12(39):5407-5413

Ming Xiao, W. M. Munief, Fengshun Wu,  R. Lilischkis, T. Oberbillig, M. Saumer, Weisheng Xia: Fabrication and characterization of Cu-Sn-Ni-Cu interconnection microstructure for electromigration studies in 3D integration, Soldering & Surface Mount Technology, 2016, Vol. 28 Iss 2 pp. 74 – 83

M. Weinmann, O. Weber, D. Bähre, W. Munief, M. Saumer, H. Natter: Photolithography – Electroforming – Pulse Electrochemical Machining: An Innovative Process Chain for the High Precision and Reproducible Manufacturing of Complex Microstructures, Int. J. Electrochem. Sci., 9 (2014) 3917 – 3927

M. Theis, S. Ediger, M. T. Schmitt, J.-E. Hoffmann, M. Saumer: Nanocrystalline electroplated NiFe-based alloys for integrated magnetic microsensors, Phys. Status Solidi A 210, No. 5, (2013) 853–858

C. Greß , M. Jeziorski, M. Saumer, K.-H. Schäfer: Simulation of in-vivo-equivalent epithelial barriers using a micro fluidic device, Biomed Microdevices (2013) DOI 10.1007/s10544-013-9821-5

Bin Wu, A. Braun, Simon Ediger, Wei Huang, R. Lilischkis, K.-H. Schäfer, Quan Wu, Xianglin Zhang, and M. Saumer. Surface quality and biocompatibility of porous hydroxyapatite scaffolds for bone tissue engineering, Phys. Status Solidi A 210, No. 5, (2013) 957–963

Tagungsbeiträge (Auszug):

M. Theis, J.E. Hoffmann, M. Saumer: Low coercivity NiFeMo thick films for wafer-level fabrication of magnetic microsensors. IEEE Xplore, DTIP 2016 Budapest conference Proceedings, 2016.

Decker D, Ingebrandt S, Rabe H, Schäfer K and Saumer M (2016). Fabrication Of 3D Nanostructured Multielectrode Arrays By Using Thermal Nanoimprint Lithography To Improve Cell Coupling For Low Signaling Neurons.  Front. Neurosci. Conference Abstract: MEA Meeting 2016 | 10th International Meeting on Substrate-Integrated Electrode Arrays.  doi: 10.3389/conf.fnins.2016.93.00039; Received: 22 Jun 2016; Published Online: 24 Jun 2016.

M. Saumer: Metal Based Nanocomposites Fabricated by Electrochemical Deposition Processes, PCMI Spring Conference June 2016, Ludwigsburg

M. Saumer. et al: PhoGaTool: A new Process Chain for Manufacturing of ECM Tools, 10th International Symposium on Electrochemical Machining Technology (INSECT) 2014; University Saarland/Germany (Proceedings: pp. 147-157, ISBN 978-3-95735-010-7)

J. Kraft, S. Tilian, K. Mattern, W. Munief, K.-H. Schäfer, M. Saumer Manufacturing of nanostructured glass surfaces using nanoimprint lithography and their effect on cell cultures, Third International Conference in Advanced Manufacturing for Multifunctional Miniaturised Devices (M6), 2014, Tsukuba, Japan

M. Saumer: Wet Electrochemical Processes for Micro-Nano-Structuring, PCMI 2014 Spring International Conference, May 26, La Chaux-de-Fonds/Switzerland


M. Saumer, S. Ediger, M. Theis: Electrochemical deposition of magnetic materials for microsystems: Process technologies and material properties, 12th Symposium „Magnetoresistive Sensors and Magnetic Systems“, 19th and 20th March 2013, Wetzlar/Germany

N. Buhleier, X. Shi, G. Yang, K. Mattern, M. Saumer: Micro structuring of Si and PDMS templates and their application for microbe culture, International Conference on Advanced Manufacturing for Multifunctional Miniaturised Devices (M6) 15th and 16th July, 2013, Zweibrücken, Germany, ISBN 978-3-00-043262-0

M. Theis, S. Ediger, Saumer, M: Electroplating of NiFe–based soft magnetic films, Proceedings M6 Conference, 15./16.July 2013, Zweibrücken, Germany, ISBN 978-3-00-043262-0;

K. Mattern, Kaufmann, M., Saumer, M: Fabrication of a nano-structured Ni stamp by electroless and electroplating, Proceedings M6 Conference, 15./16. July 2013 Zweibrücken, Germany, ISBN 978-3-00-043262-0

M. Saumer: A MICRO FLUIDIC IN-VITRO-SYSTEM FOR THE SIMULATION OF EPITHELIAL BARRIERS, 1St International Conference on Design and Processes for Medical Devices (PROMED), 2.-4. Mai 2012, Brescia/Italien

M. Saumer: ELECTROCHEMICAL MANUFACTURE OF METALS FOR MICRO STRUCTURING, International Conference in Advanced Manufacturing for Multifunctional Minaturised Devices, 21.-22. Mai 2012, Wuhan/China


David P. Arnold, Monika Saumer, Yong-Kyu Yoon (2011) Additive Processes for Metals; in: Rheza Ghodssi, Pinyen Lin: MEMS Materials and Processes Handbook, Springer New York, 2011, Chapter 3, 137-191


“Micro fluidic system for simulating in vivo-equivalent cell barriers” Europäische Patentanmeldung (2013)12 000 996.4-1521

“Verfahren zur Herstellung magnetischer Funktionsschichten, magnetischer Schichtwerkstoff sowie Bauelemente mit einem magnetischen Schichtwerkstoff“ Deutsche Patentanmeldung (2013) DE 10 2013 011 709 A1 2015.01.15